Contactless electromagnetic switched interrogation of micromechanical cantilever resonators

Integrated micromechanical cantilever magnetometry of Ga12xMnxAs

We have developed a technique for fabricating submicron GaAs micromechanical cantilevers into which lithographically patterned samples grown by molecular beam epitaxy or evaporative deposition are integrated. The torque sensitivity of the 100-nm-thick cantilevers makes them ideal for torsional magnetometry of nanometer-scale, anisotropic samples. We present measurements on samples of the ferrom...

High-frequency micromechanical columnar resonators.

High-frequency silicon columnar microresonators are fabricated using a simple but effective technological scheme. An optimized fabrication scheme was invented to obtain mechanically protected microcolumns with lateral dimensions controlled on a scale of at least 1 μm. In this paper, we investigate the influence of the environmental conditions on the mechanical resonator properties. At ambient c...

Advanced biosensing using micromechanical cantilever arrays.

Nonlinear Dynamics of Nanomechanical and Micromechanical Resonators

Gallium nitride micromechanical resonators for IR detection

This paper reports on a novel technology for low-noise un-cooled detection of infrared (IR) radiation using a combination of piezoelectric, pyroelectric, electrostrictive, and resonant effects. The architecture consists of a parallel array of high-Q gallium nitride (GaN) micro-mechanical resonators coated with an IR absorbing nanocomposite. The nanocomposite absorber converts the IR energy into...